Organization

The Institute of Nanotechnologies of Lyon was created on January the 1rst, 2007, through the merger of three laboratories : the Laboratory of Electronics, Optoelectronics and Microsystems (Laboratoire d'Electronique Optoélectronique et Microsystèmes - LEOM) of Ecole centrale de Lyon, the Laboratory of Material Physics (Laboratoire de Physique de la Matière - LPM) of INSA de Lyon and the Laboratory of Electronics Nanotechnologies and Sensors (Laboratoire d'Electronique Nanotechnologies et Capteurs - LENAC) of Université Lyon 1.

Head of INL : Guy Hollinger
In charge of ECL activities : Ian O'Connor , deputy director of INL

Equipments

INL is running a  Micro-Nano-Bio technology platform which allows  to produce  microelectronic, optoelectronic and photonic devices,  microsystems and biochips.
Main equipments :
 Clean room equipped with  optical and electronic lithography,  metallization, dry etching tool and micromachining platform.
 Three molecular beam epitaxy reactors  (III-V, Si/Ge, oxides) and two plasma reactor for dielectric deposition.
 Biochip production tools
 Characterization  equipments (electrical, optical, structural, surfaces).
 Computing resources

Industry cooperation

VALORISATION  INDUSTRIAL PARTNERSHIP  STMicroelectronics, CEA-LETI, Inpact, SOITEC, Alcatel, ATMEL
 7 patents

Key figures

 35 permanent staff
 25 PhD students  and postdocs

 Budget : 1,4 M€

 Publications (annual production):
 25 publications
 40  international conference proceedings
 7 PhD thesis